摘要：The micro-wall between two adjacent pores on the flexible joint is the core structure affecting the performance of gyro. The thickness of the micro-wall is only about 30μm and decreases to 20μm after being machined. It is a low-stiffness structure easily affected by grinding force. Larger force can break the micro-wall. Hence, appropriate grinding force must be controlled to make balance between machining efficiency and surface quality. Besides, different thickness before being machined affects the machining stability as well. The present paper firstly introduces the developed machine tool used for grinding the micro-walled. With this machine tool, removal of the process can be measured as well. Detailed measuring theory and grinding processes are presented. The force can be adjusted and monitored in the micro-grinding process. To achieve stable removal, the related thickness is analysed by experiments. With this machine tool, the process of machining-measuring micro-wall is efficient.
