摘要：Developing miniaturizedultraprecision machine tools (MUMTs) is a rational approach to manufacture micro/mesoscale mechanical components. The dynamic characteristics of MUMTs can be different from that of conventional machine tools, because of its miniaturized structure, downsized components and more flexible assembly. Their dynamics behaviorneeds to be studied. In this paper, the dynamic characteristics of a verticalultraprecisionmicro grinding machine tool were analyzed. An analysis model was established based on finite element method(FEM). Modal analysis was then conducted to obtain vibration mode characteristics of the machine tool, and then the harmonic response analysis was applied to machine tool for verifying its mechanical behaviour. This work helps MUMT developers make a better product at the early design stage with lower cost and development time
