摘要：Abstract This paper addresses the modeling and scheduling problem of multi-cluster tools with residency constraints. On the basis of time constraint sets, the problem is formulated as a mixed integer programming problem with objective of minimizing the fundamental period. A deadlock-free solution for optimal schedule of robot moves is proposed. To validate the feasibility and the efficiency of the mathematical model, a case study is presented. The results indicate that the scheduling solutions are feasible and efficient.
