摘要：In nanopositioning systems, force feedback control has been proposed as an advanced control technique to enhance the bandwidth of the system and improve the tracking performance. In direct tracking with force feedback control, the architecture employs an inner force feedback loop to damp the first resonance peak and enhance the bandwidth. The position feedback loop is then used to enhance the tracking performance of the overall system. This paper discusses the practical issues associated with the control design of force feedback. The paper presents hardware results to support the analysis and proposes a systematic tuning method to retain the advantages of the force feedback control in the face of load variations.
