摘要：Based on the working principle of SiBCN temperature sensor and the principle of perturbation method, a wireless sweep signal transceiver system based on SiBCN temperature sensor covering 10 ~ 12GHz is designed to measure the temperature in harsh environmental such as high temperature, high oxidation and strong corrosion. Through the joint test of the system, the experimental results show that the resonant frequency and temperature of the sensor are negatively correlated at 25 ~ 350 °C, that is, the temperature is increased and the frequency decreases, which is consistent with the formula.The temperature and frequency change rate is about 421.2kHz / 0C,which achieve the performance indicators of the SiBCN temperature sensor on the hardware system.
