摘要：AbstractConsidering a cantilever motion subject to electrostatic actuation and tunneling current sensing, a multi-mode model is first analyzed, with an emphasis on the effect of actuator/sensor location. In particular, it is underlined how specific locations can result in a model of reduced order, making in turn a related control design more simple. This is then illustrated by a robust control scheme aiming at positioning the cantilever. This control in particular handles the effect of proximity forces, and the results are illustrated in simulation.
关键词：KeywordsMulti-mode modelcantilever motionelectrostatic actuationtunneling currentrobust controlproximity force
