摘要:This paper has proposed an automatic precise alignment coupling algorithm of planar optical waveguide devices based on polynomial fitting, and the experiment shows that for 1 × 8 planar optical waveguide splitter, the time it takes for alignment is within 2.5 min and for 1 × 16 planar optical waveguide splitter, the required time is within 3 min. For 1 × 8 planar optical waveguide splitter, many repeated experiments can guarantee that the insertion loss of the device channels is less than 10.5 dB, with the maximum uniformity of 0.67 dB; for 1 × 16 planar optical waveguide splitter, many repeated experiments can guarantee that the insertion loss of the device channels is less than 13.7 dB, with the maximum uniformity of 0.66 dB. The alignment velocity, precision, and reliability of this algorithm are all greatly increased.