摘要：We used micro-double-staged laminated object manufacturing process (micro-DLOM) to fabricate 3D micromold. Moreover, the error of the micro-DLOM was also studied. Firstly, we got the principle error of the micro-DLOM. Based on the mathematical expression, it can be deduced that the smaller the opening angle α and the steel foil thickness h are, the smaller the principle error δ is. Secondly, we studied the error of femtosecond laser cutting. Through the experimental results, we know that the error of femtosecond laser cutting is 0.5 μm under 110 mW femtosecond laser power, 100 μm/s cutting speed, and 0.75 μm dimension compensation. Finally, we researched the error of microelectric resistance slip welding. Based on the research results, we can know that the minimum error of microcavity mold in the height direction is only 0.22 μm when welding voltage is 0.21 V and the number of slip welding discharge is 160.
