摘要：AbstractIn this paper, the correlation dimension, which describes chaotic motion, is used toanalyze the time series of silicon single crystal diameter. It is furthermore used to extract thedynamics characteristics of silicon single crystal dislocation. However, the correlation dimensionis difficult to realize automatic calculation. This paper proposes a new automatic calculation method for the correlation dimension based on fuzzy C regression model (FCRM) algorithm. In this method, FCRM algorithm is used to identify the correlation integral curve of the scale-free zone. The correlation integral curve slope of the scale-free zone is the correlation dimension. The proposed method is investigated through both simulation and experimentation. Both demonstrate that the proposed automatic calculation method of the correlation dimension has higher computation precision and efficiency, and can effectively extract the dynamics characteristics of silicon single crystal dislocation.
关键词：Keywordscorrelation dimensionsilicon single crystal dislocationfeatures extractionautomatic calculationfuzzy C regression model
