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  • 标题:Fabrication of Magnetically Driven Microvalve Arrays Using a Photosensitive Composite
  • 本地全文:下载
  • 作者:Tasuku Nakahara ; Junya Suzuki ; Yuki Hosokawa
  • 期刊名称:Maine Policy Review
  • 印刷版ISSN:2312-7481
  • 出版年度:2018
  • 卷号:4
  • 期号:1
  • 页码:7
  • DOI:10.3390/magnetochemistry4010007
  • 语种:English
  • 出版社:The University of Maine
  • 摘要:Microvalves play an important role in fluid control in micro total analysis systems (µTAS). Previous studies have reported complex fabrication processes for making microvalve elements in a channel. Hence, there is a need for a simpler microvalve fabrication method for achieving throughput improvement and cost reduction in µTAS. In this study, we propose a simple fabrication method for a magnetically driven microvalve array using a photosensitive composite. The composite was prepared by mixing a photoresist and magnetic particles of pure iron. The simple fabrication process was performed by using a laminating layer composed of a sacrificial part and the composite in a channel. The microvalve elements were fabricated by one-step photolithography using the processability of the sacrificial layer and composite. Further, we demonstrated the magnetic driving property of the fabricated microvalve array device. Compared to devices containing non-driving microvalves, the flow rate was decreased by 50%, and the pressure difference between the inlet and outlet increased by up to 4 kPa with increase in driving microvalve elements. These results imply that our proposed device could be useful for practical µTAS applications.
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