摘要：Today, micro components are used in various industrial sectors such as electronics engineering and medical applications. The final quality of such parts depends on each individual step of the production chain from the manufacturing of semi-finished parts to the post-processing. In this study, magnetron sputtering is used to manufacture thin (15-30 μm) aluminium-zirconium alloy foils for the deep drawing of high strength and hardenable micro cups, which can be, for example, employed as micro valve caps. The development of a novel process chain for the production of these parts includes four different steps, beginning with the production of Al-Zr foils by magnetron sputtering. Secondly, tensile tests are performed with the foils in order to estimate their mechanical properties. Subsequently, micro deep drawing is used to produce the cup’s shape, and finally, a heat treatment in a drop-down tube furnace adjusts the cup’s hardness during fall. It is shown in particular that Al-Zr foils produced by magnetron sputtering have an attractive cold forming and hardening potential due to a microstructure consisting essentially of an oversaturated solid solution of zirconium in the aluminium matrix. This material state enables adequate formability and simplifies the heat treatment process since no solution annealing is required.
