摘要：We study the structural change of Aluminum thin film due to heat treatment. The film is heated up from room temperature of 300 K to 1000 K where it is already above melting temperature of Aluminum. Molecular dynamics simulation is employed to observe the behavior of the system since it provides atomistic detail. The structural transformation is investigated based on the structure factor and pair distribution function which indicated the broadening of the peak of crystal structure due to phase transition of the material. Atomistic information revealed the local lattice structure change based on Common Neighbor Analysis (CNA) methods.
