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  • 标题:Comparison of bulk FinFET and SOI FinFET
  • 本地全文:下载
  • 作者:Ying-Yu Chen ; Yu-Hsien Lin
  • 期刊名称:MATEC Web of Conferences
  • 电子版ISSN:2261-236X
  • 出版年度:2018
  • 卷号:201
  • DOI:10.1051/matecconf/201820102009
  • 语种:English
  • 出版社:EDP Sciences
  • 摘要:In this study, we compare the differences and advantages between Bulk FinFET and SOI FinFET. The results are simulated by using the ISE TCAD software. By changing the parameters of the gate voltage, drain voltage and gate length to analysis which characteristic is better. Through the experiment results, we demonstrate that the SOI FinFET have the better characteristics than bulk FinFET[1].
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