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  • 标题:Study on the performance of MOS - based displacement sensor
  • 本地全文:下载
  • 作者:Baoshan Wang ; Lijie Cao
  • 期刊名称:MATEC Web of Conferences
  • 电子版ISSN:2261-236X
  • 出版年度:2018
  • 卷号:232
  • DOI:10.1051/matecconf/201823204089
  • 语种:English
  • 出版社:EDP Sciences
  • 摘要:The AZO film has a laser-induced lateral photovoltage (LPV): the saturation values of this photovoltage vary linearly with the position of laser spot. While, we coated a diatomite film on position sensitive detectors based on AZO-SiO2-Si structure. Sensitivity and saturation power are apparently improved, and the sensitivity reached 108.1mw/mm for the transient peak value. Maximum saturation voltage reached 72.1mw. This work demonstrates a novel way to increase sensitivity for position sensitive detectors.
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