文章基本信息
- 标题：Heterogeneous Integration of Metal Oxides—Towards a CMOS Based Multi Gas Sensor Device
- 本地全文：下载
- 作者：Anton Köck ; Marco Deluca ; Florentyna Sosada-Ludwikowska 等
- 期刊名称：Proceedings
- 电子版ISSN：2504-3900
- 出版年度：2019
- 卷号：14
- 期号：1
- 页码：5
- DOI：10.3390/proceedings2019014005
- 语种：English
- 出版社：MDPI AG
- 摘要：A worldwide unique CMOS based chemical sensor device comprising an array of 8 microhotplates (µhps) for a total of 16 chemical sensors has been fabricated (Figure 1). [...]
