摘要：The paper is dedicated to analysis and practical exploitation of new generation vibroactive pad, whose fundament is stack type actuator. Experiment is performed in order to find first resonant mode of vibroactive pad, and later on pad is applied in mechanical hot imprint process, pursuing to enhance the quality of created microstructure. Three types of microstructure quality measurements are performed: measurement of diffraction efficiency, optical microscopy and atomic force microscopy, in order to analyze the quality of replica. Microstructures are created on the surface of polycarbonate, using the same process parameters, the only variable is high frequency excitation or its absence.
关键词：vibroactive pad; hot imprint; diffraction efficiency.
