摘要：Piezoelectric actuators are widely used for highprecision mechanical systems such as positioning devices,manipulating systems, control or flow control equipmentand etc [1 - 3]. Piezoelectric actuators have advanced fea-tures such as high resolution, short response time, compactsize, and good controllability [1, 2, 4]. Many design prin-ciples of piezoelectric actuators are proposed and used [5].Summarizing its all the following types of piezoelectricactuators can be specified: traveling wave, standing wave,hybrid transducer, and multimode vibrations actuators [2,6].
