摘要:Nowadays, with technologies rushing to an age ofminiaturization based on microelectromechanical systems(MEMS), batteries become a critical juncture betweenmacro and micro worlds. Even the smallest conventionalbatteries may be much larger than the MEMS system beingsupplied by power. This, in turn, limits the extent to whichthe size of overall device can be shrunk. Most of MEMSideally have to work for long periods, and it is not alwayseasy to replace or recharge their batteries. Thus, alterna-tives for MEMS long - lasting energy harvesting must besought for.