期刊名称:International Journal of Computer Science & Technology
印刷版ISSN:2229-4333
电子版ISSN:0976-8491
出版年度:2013
卷号:4
期号:1
页码:26-28
语种:English
出版社:Ayushmaan Technologies
摘要:An increase in the research activity of industrial micromation made us to design the differential capacitive MEMS accelerometer. The simulation of static performance of accelerometer is accomplished with FEM analysis. A 3-Dimensional solid mechanics Finite Element analysis is conducted to calculate capacitance change when proof mass is subjected to acceleration. Design and simulations are done using the COMSOL multiphysics software.