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  • 标题:Design of Capacitive Accelerometer Using Comsol Multiphysics
  • 本地全文:下载
  • 作者:Harika K ; Amitha S ; Swapna P
  • 期刊名称:International Journal of Computer Science & Technology
  • 印刷版ISSN:2229-4333
  • 电子版ISSN:0976-8491
  • 出版年度:2013
  • 卷号:4
  • 期号:1
  • 页码:26-28
  • 语种:English
  • 出版社:Ayushmaan Technologies
  • 摘要:An increase in the research activity of industrial micromation made us to design the differential capacitive MEMS accelerometer. The simulation of static performance of accelerometer is accomplished with FEM analysis. A 3-Dimensional solid mechanics Finite Element analysis is conducted to calculate capacitance change when proof mass is subjected to acceleration. Design and simulations are done using the COMSOL multiphysics software.
  • 关键词:Capacitive Accelerometer;FEM Analysis;COMSOL Multip hysics
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