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  • 标题:Investigating the surface layer of micro-features machined by Spark Assisted Chemical Engraving
  • 本地全文:下载
  • 作者:Jana D. Abou Ziki
  • 期刊名称:IFAC PapersOnLine
  • 印刷版ISSN:2405-8963
  • 出版年度:2019
  • 卷号:52
  • 期号:10
  • 页码:315-318
  • DOI:10.1016/j.ifacol.2019.10.049
  • 语种:English
  • 出版社:Elsevier
  • 摘要:AbstractThis work investigates the potential of modifying the surface of micro-features machined on glass by Spark Assisted Chemical Engraving (SACE). It is shown that micro-particles added to the electrolyte could be bonded to the glass surface on some locations. It is believed that these particles were attached to a glass surface layer that is reformed during machining. The thickness of this layer could not be quantified. Future work will investigate the nature of the particle-glass bond and the thickness of the surface layer.
  • 关键词:KeywordsSACEglass micromachiningsurface layer
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