摘要：AbstractThe paper investigated vibration control of micro piezoelectric actuator (MPA) using an electrorheological fluid (ERF) active support. In this era of micro-mechanical systems, technological advancement requires an effective way of damping these microstructures. MPA is used in micro air vehicles and micro-robotics in general. Utilization of piezoelectric cantilever beam and ERF as a damper presents a novel driving technique. The damping characteristics of the MPA by subjecting the system to unit excitations were investigated experimentally. The experimental results compared damping ratios of the free vibration of the MPA with and without ERF, MPA with non-activated ERF support and MPA with activated ERF support. It was concluded that when there is no electric field applied to the ERF the damping ratio is higher than when an electric field is applied.
