To plan Internetware reliability in advance can effectively save cost and guarantee the reliability of Internetware system. The conversion method of Markov chain of Internetware based on architecture and the reliability calculation method are studied; the reliability function based on structure is proposed; the characteristics of the improvement of Internetware reliability is analyzed; the cost function of Internetware reliability is studied; the uncertainty of dynamic distribution in a certain range and the distribution accuracy are improved; the pre-distribution is put forward; the effective planned distribution of Internetware reliability is realized by using optimization calculation algorithm. The experiments prove that the proposed method can effectively distribute Internetware reliability with high system reliability, low cost and short distribution calculation time.