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  • 标题:Sensitivity and Directivity Analysis of Piezoelectric Ultrasonic CantileverBased MEMS Hydrophone for Underwater Applications
  • 本地全文:下载
  • 作者:Basit Abdul ; Vincenzo Mariano Mastronardi ; Antonio Qualtieri
  • 期刊名称:Journal of Marine Science and Engineering
  • 电子版ISSN:2077-1312
  • 出版年度:2020
  • 卷号:8
  • 期号:421
  • 页码:784
  • DOI:10.3390/jmse8100784
  • 语种:English
  • 出版社:MDPI AG
  • 摘要:In this paper, we report on the characterization of the sensitivity and the directionality of a novel ultrasonic hydrophone fabricated by microelectromechanical systems (MEMS) process, using aluminum nitride (AlN) thin film as piezoelectric functional layer and exploiting a stress-driven design. Hydrophone structure and fabrication consist of four piezoelectric cantilevers in cross configuration, whose first resonant frequency mode in water is designed between 20 kHz and 200 kHz. The MEMS fabricated structures exploit 1 µm and 2 µm thick piezoelectric AlN thin film embedded between two molybdenum electrodes grown by DC magnetron sputtering on silicon (Si) wafer. The 200 nm thick molybdenum electrodes thin layers add a stressgradient through cantilever thickness, leading to an outofplane cantilever bending. A water resistant parylene conformal coating of 1 µm was deposited on each cantilever for waterproof operation. AlN upward bent cantilevers show maximum sensitivity up to −163 dB. The cross configuration of four stressdriven piezoelectric cantilevers, combined with an opportune algorithm for processing all data sensors, permits a finer directionality response of this hydrophone.
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