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  • 标题:Miniaturized Thermal Acoustic Gas Sensor Based on a CMOS Microhotplate and MEMS Microphone
  • 本地全文:下载
  • 作者:Richard Hopper ; Daniel Popa ; Vasileios Tsoutsouras
  • 期刊名称:Proceedings
  • 电子版ISSN:2504-3900
  • 出版年度:2020
  • 卷号:54
  • 期号:48
  • 页码:3
  • DOI:10.3390/proceedings2020056003
  • 语种:English
  • 出版社:MDPI AG
  • 摘要:In this work, we present a novel thermal acoustic gas sensor, fabricated using a CMOS microhotplate and MEMS microphone. The sensing mechanism is based on the detection of changes in the thermal acoustic conversion efficiency which is dependent on the physical properties of the gas. The gas sensor has all the benefits of CMOS technology, including low cost and miniaturization. Here, we demonstrate its application for CO2 gas detection.
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