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  • 标题:Controlling the fabrication of sub-microgrooves on a silicon surface using a femtosecond laser
  • 本地全文:下载
  • 作者:Mahmoud A. Al-Gawati ; Abdulaziz N. Alhazaa ; Abdullah N. Alodhayb
  • 期刊名称:Journal of King Saud University - Science
  • 印刷版ISSN:1018-3647
  • 出版年度:2021
  • 卷号:33
  • 期号:1
  • 页码:1-7
  • DOI:10.1016/j.jksus.2020.101251
  • 语种:English
  • 出版社:Elsevier
  • 摘要:AbstractAltering the surface morphology is an approach that is commonly used to enhance desired properties. Femtosecond laser was used to fabricate sub-microgrooves at an average laser power of 31 mW with different scan speeds for a wavelength of 1026 nm. The effect of the laser wavelength on the sub-microstructure fabrication was also studied using 342 and 1026 nm wavelengths using spherical lens f = 40 mm with average powers of 9 mW and 25mW for UV and IR respectively. The sub-microgrooves had the same direction for horizontal, vertical, and diagonal scans. The fabricated sub-microstructures were investigated by a Field Emission Scanning Electron Microscope (FE-SEM) and an Atomic Force Microscope (AFM). At low scan speeds, sub-microgrooves did not appear because the number of pulses was too high. Thus, a high number of pulses per unit length can cause the sub-microgrooves to overlap, owing to the thermal effects. The overlap effects disappeared at scan speeds of 3 mm/s and higher. The sub-microgrooves length decreased as the scan speed increased. Separation distance and width increased with the scan speed. The separation distance reached a maximum value for the samples fabricated at a scan speed of 20 mm/s. At higher speeds, it decreased.
  • 关键词:Femtosecond laser;Sub-microfabrication;Silicon;Sub-microgrooves;Wavelength;FE-SEM;AFM
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