摘要：A rapid prototyping technique is demonstrated which uses a red femtosecond laser to produce a metallic mould which is then directly used for the replica moulding of PDMS. The manufacturing process can be completed in less than 6 h making it a viable technique for testing new designs quickly. The technique is validated by creating a microfluidic device with channels of height and depth of 300 µm, with a ramp test structure where the height and width of the channels reduces to 100 µm to demonstrate the techniques 3D capabilities. The resulting PDMS device was easily removed from the metallic mould and closely replicated the shape aside the expected shrinkage during thermal curing. As the technique uses a single replica process, the surface roughness at the base of the channels corresponds to the un-ablated polished metal mould, resulting in a very low surface roughness of 0.361 nm. The ablated metallic mould surface corresponds to the top of the PDMS device, which is bonded to glass and does not affect the flow within the channels, reducing the need for optimisation of laser parameters. Finally, the device is validated by demonstrating laminar flow with the no-slip condition.
关键词：Microfluidics; micromanufacture; laser; rapid prototyping; 3D microfluidic chip; lithography
