摘要：AbstractPiezo-stepper actuators are used in many nanopositioning systems due to their high resolution, high stiffness, fast response, and the ability to position a mover over an infinite stroke by means of motion reminiscent of walking. The aim of this paper is to develop a control approach for attenuating disturbances that are caused by the walking motion and are therefore repeating in the commutation-angle domain. A new iterative learning control approach is developed for the commutation-angle domain, that addresses the iteration-varying and non-equidistant sampling that occurs when the piezo-stepper actuator is driven at varying drive frequencies by parameterizing the input and error signals. Experimental validation of the framework on a piezo-stepper actuator leads to significant performance improvements.
关键词：KeywordsIterative Learning ControlFeedforward ControlMotion Control SystemsPiezo ActuatorsMicromechantronic Systems
