摘要：AbstractThis article describes the design and calibration of a five degree-of-freedom linear and angular displacement sensor utilizing piezoresistive strain gages. A simple decentralized controller is then implemented to follow linear and angular reference signals. The foremost difficulty with piezoresistive sensors is their high-temperature sensitivity. In addition, they are sensitive to motion in multiple degrees of freedom, which must be decoupled before use as a displacement sensor. A new sensing design is proposed which provides decoupled measurements of linear and angular displacements in multi-axis monolithic nanopositioning stages. The proposed method employs system identification and feedforward techniques to calibrate each axis and minimize cross-coupling.
关键词：KeywordsNanopositioningPiezoresistive sensorsDecentralized control
