摘要：AbstractA two-axis Fast Steering Mirror (FSM) is a commonly used mechanical component used in optical imaging and laser beam steering. This paper shows how inverse kinematic analysis and dynamic input shaping can be used to compute the two-axis input signals for the actuation of a FSM to be able to track a desired output trajectory. The approach is based on quasi-static kinematic analysis and dynamic modeling of a two-axis FSM multivariable motion from experimental step response data. It is shown how open-loop tracking can be improved by properly designed dynamic input shaping signals that take into account the inverse kinematics and dynamic response of the FSM.
