文章基本信息

标题：Effect of rare earth oxide CeO2 on the anodic bonding performance of PEG-based MEMS encapsulation materials
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作者：Chao Du ; Cuirong Liu ; Xu Yin 等
期刊名称：Advances in Mechanical Engineering
印刷版ISSN：1687-8140
电子版ISSN：1687-8140
出版年度：2021
卷号：13
期号：3
页码：1-9
DOI：10.1177/16878140211007712
语种：English
出版社：Sage Publications Ltd.
摘要：Herein, we synthesized a new polyethylene glycol (PEG)-based solid polymer electrolyte containing a rare earth oxide, CeO2, using mechanical metallurgy to prepare an encapsulation bonding material ...
关键词：Polymer electrolyte; rare earth oxide; anodic bonding; MEMS encapsulation