摘要：In order to satisfy the demand for the high functionality of future microdevices, research on new concepts for multistable microactuators with enlarged working ranges becomes increasingly important. A challenge for the design of such actuators lies in overcoming the mechanical connections of the moved object, which limit its deflection angle or traveling distance. Although numerous approaches have already been proposed to solve this issue, only a few have considered multiple asymptotically stable resting positions. In order to fill this gap, we present a microactuator that allows large vertical displacements of a freely moving permanent magnet on a millimeter-scale. Multiple stable equilibria are generated at predefined positions by superimposing permanent magnetic fields, thus removing the need for constant energy input. In order to achieve fast object movements with low solenoid currents, we apply a combination of piezoelectric and electromagnetic actuation, which work as cooperative manipulators. Optimal trajectory planning and flatness-based control ensure time- and energy-efficient motion while being able to compensate for disturbances. We demonstrate the advantage of the proposed actuator in terms of its expandability and show the effectiveness of the controller with regard to the initial state uncertainty.
