摘要：Abstract. The applications of freeform surfaces in optical components and systems are increasing more andmore. Therefore, appropriate measurement techniques are needed to measure these freeform surfaces for verification. This task is still a challenge for most measurement techniques. In this paper, we propose a measurementtechnique for optical and other specular freeform surfaces based on experimental ray tracing. This technique isable to measure form and mid-spatial-frequency deviations simultaneously. The focus will be set on the sensing technique and the measurement uncertainties in the setup. As the measurement technique is described, anestimation of the influence of different uncertainties based on simulations is given. The result from an experimental measurement is evaluated in relation to the influence of the uncertainties. A comparison measurement forevaluation is given.
