摘要：Silica microlens arrays (MLAs) with multiple numerical-apertures (NAs) have high thermal and mechanical stability, and have potential application prospects in 3D display and rapid detection. However, it is still a challenge to rapidly fabricate silica MLAs with a larger range of NAs and how to obtain multiple NAs in the same aperture diameter. Here, a wet etching assisted spatially modulated femtosecond laser pulse fabricating technology is proposed. In this technology, Gaussian laser pulse is modulated in the axial direction to create a pulse with a large aspect ratio, which is used to modify the silica to obtain a longer modification distance than traditional technology. After that, a microlens with a larger NA can be obtained by etching, and the NA variable range can be up to 0.06–0.65, and even under the same aperture, the variable NA can range up to 0.45–0.65. In addition, a single focus is radially modulated into several focus with different axial lengths to achieve a single exposure fabricating of MLA with multiple NAs. In characterization of the image under a microscope, the multi-plane imaging characteristics of the MLA are revealed. The proposed technology offers great potential toward numerous applications, including microfluidic adaptive imaging and biomedical sensing.
