摘要：High-precision detection of electric charge is critical for physical, chemical, and biological measurements. Nanophotonic optomechanical system confines the optical field at the nanoscale and enables a strong interaction between optical cavity and mechanical resonator. Its high optical quality factor cavity and strong optomechanical coupling are promising for precision sensing applications. Here an integrated optomechanical electrometer is proposed for the electric charge sensing using a zipper cavity with a suspended photonic crystal nanobeam (PCN) acting as a movable mechanical resonator. As the electrostatic force arising from the electric voltage to be measured interacts with the mechanical motion of the movable PCN and modulates its resonance through electrostatic stiffening effect, optomechanical coupling transduces the mechanical motion to the optical field with enhanced sensitivity. The resonance shift of the mechanical resonator can be monitored to detect the electric voltage with a sensitivity of 0.007 Hz/mV2$\mathrm{Hz}/\mathrm{m}{\mathrm{V}}^{2}$. Moreover, the sensing performance can be further enhanced with the operation of the optomechanical electrometer in the self-sustained oscillation above threshold power. Owing to the narrow-linewidth of detector radio frequency (RF) spectrum with a large peak-to-noise floor ratio (up to 73.5 dB), the enhanced electrical sensitivity of 0.014 Hz/mV2$\mathrm{Hz}/\mathrm{m}{\mathrm{V}}^{2}$ is achieved with a high resolution of 1.37 mV2Hz−1/2$1.37\,\mathrm{m}{\mathrm{V}}^{2}\mathrm{H}{\mathrm{z}}^{-1/2}$. A theoretical minimal detectable electrostatic charge is calculated as 1.33×10−2 eHz−1/2$1.33{\times}{10}^{-2}\,\mathrm{eH}{\mathrm{z}}^{-1/2}$ by converting the measured electric voltage versus RF shift to an approximatively linear relationship. This on-chip optomechanical electrometry scheme provides a powerful solution to the ultrasensitive determination of charged nanoparticles in biological and chemical applications.
