摘要：Micro conveyance devices are important elements in high precision positioning systems, which play vital roles in many scientific and industrial fields and are widely needed in many applications. This work presents the modeling and experimental validation of a pre-designed and fabricated micro conveyance device. This micro conveyance device consists of eight elementary electromagnetic digital actuators and can realize a conveyance application based on a stick-slip driving principle. A dynamic model based on the prototype device was established for stick-slip displacement simulation. Four sub-models of the dynamic model regarding the calculation of actuation force and friction force within the device were built and integrated. Experiments focusing on the conveyance application were carried out to test the performance of the prototype device. It has been observed that the simulated results obtained using the dynamic model were in good agreement with the experiment results. The proposed device suggests an alternative to the micro conveyance system.
