期刊名称：Journal of Computational Science and Technology
电子版ISSN：1881-6894
出版年度：2013
卷号：7
期号：2
页码：148-155
DOI：10.1299/jcst.7.148
出版社：The Japan Society of Mechanical Engineers
摘要：In this paper, we considered a polymer-based piezoelectric stack actuator based on MEMS nano-positioning technology. A no-wiring structure was used for simplicity of fabrication and to avoid irregularity deformation under wiring. We selected the key parameters for actuation design, and a simulation was executed through FEM analysis of the electric field and deformation. From this simulation, we decided upon the appropriate parameters of the actuator.
