摘要：Quantitative studies of nanoscale heat dissipation (Joule heating) are essential for advancing nano-science and technology. Joule heating is widely expected to play a critical role in accelerating electromigration induced device failure. However, limitations in quantitatively probing temperature fields—with nanoscale resolution—have hindered elucidation of the role of Joule heating in electromigration. In this work, we use ultra-high vacuum scanning thermal microscopy to directly quantify thermal fields in nanowires during electromigration. Our results unambiguously illustrate that electromigration begins at temperatures significantly lower than the melting temperature of gold. Further, we show that during electromigration voids predominantly accumulate at the cathode resulting in both local hot spots and asymmetric temperature distributions. These results provide novel insights into the microscopic details of hot spot evolution during electromigration and are expected to guide the design of reliable nanoscale functional devices.
