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  • 标题:Pressure Control Organic Vapor Deposition Methods for Fabricating Organic Thin-Film Transistors
  • 本地全文:下载
  • 作者:Ahn, SeongDeok ; Kang, Seong Youl ; Oh, Ji Young
  • 期刊名称:ETRI Journal
  • 印刷版ISSN:1225-6463
  • 电子版ISSN:2233-7326
  • 出版年度:2012
  • 卷号:34
  • 期号:6
  • 页码:970-973
  • DOI:10.4218/etrij.12.0212.0266
  • 语种:English
  • 出版社:Electronics and Telecommunications Research Institute
  • 摘要:In this letter, we report on the development progress of a pressure control organic vapor deposition (PCOVD) technology used to design and build a large area deposition system. We also investigate the growth characteristics of a pentacene thin film by PCOVD. Using the PCOVD method, the mobility and on/off current ratio of an organic thin-film transistor (OTFT) on a plastic substrate are and , respectively. The developed OTFT can be applied to a flexible display on a plastic substrate.
  • 关键词:PCOVD;pentacene;OTFT;plastic substrate
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