出版社：Electronics and Telecommunications Research Institute
摘要：This paper proposes a compact, energy-efficient, and smart gas sensor platform technology for ubiquitous sensor network (USN) applications. The compact design of the platform is realized by employing silicon-on-insulator (SOI) technology. The sensing element is fully integrated with SOI CMOS circuits for signal processing and communication. Also, the micro-hotplate operates at high temperatures with extremely low power consumption, which is important for USN applications. ZnO nanowires are synthesized onto the micro-hotplate by a simple hydrothermal process and are patterned by a lift-off to form the gas sensor. The sensor was operated at and showed a good response to 100 ppb gas.
关键词：SOI CMOS-based gas sensor platform technology;USN;micro-hotplate;ZnO nanorods;$NO_2$ gas sensing
