出版社：Electronics and Telecommunications Research Institute
摘要：We demonstrate a new fabrication method for adjusting the temperature dependence of a polymeric arrayed-waveguide grating (AWG) on a Si substrate. A temperature-dependent wavelength shift of-0.1nm/ in a polymeric AWG on a Si substrate is reduced of+0.1nm/ by detaching part of the polymer film, including the grating channel region of the AWG, from the Si substrate while the other parts remain fixed on the substrate.
