出版社：Society for Microwave Technique, Technologies and Systems, Serbia and Montenegro IEEE MTT-S Chapter
摘要：The present w ork summarizes the design and development of 2×2 micromachined patch antenna array. Wafer thinning is carried out to cater for high frequency operations. Detailed design methodology with fabrication process steps is outlined in this article. A new concept of composite (Silicon- Glass) substrate synthesizing along with micromachined structure has been presented to shift the operating frequency band of the antenna. Comparative study is carried out for various antenna configurations. A good agreement is observed between the experimental results and simulated values
关键词：Micromachined antenna; microstrip; High ; resistivity silicon (HRS); frequency agility
