其他摘要：This paper presents the nano-polysilicon thin film pressure sensor, which consists of four nano- polysilicon thin film resistances fabricated on the silicon membrane of C-type silicon cup, and the resistances make up the Wheatstone bridge structure. The chip of sensor is fabricated by micro electromechanical system (MEMS) technology on a silicon wafer. When supply voltage VDD = 5.0 V, the sensitivity is 0.15 mV/kPa, and the accuracy is 0.39 %F.S.; tire pressure measurement can be realized. According to the characteristics of tire pressure sensors and the NRF24L01 wireless communication technology, the Tire Pressure Monitoring System (TPMS) is designed. By transmitting data timely through the wireless module, this system can realize the wireless and real-time monitoring, so as to ensure the safety of the vehicle.
