摘要：In order to accurately measure the pressure and the pressure difference between two points in the vacuum chamber, a large number of experimental data were used to research the performance of the three capacitance diaphragm gauge and analysis the main influences of the uncertainly degree of pressure in the process. In this paper, three kind of uncertainty, such as the single uncertainty, the synthesis uncertainty and the expanded uncertainty of the three capacitance diaphragm gauges are introduced in detail in pressure measurement. The results show that the performance difference of capacitance diaphragm gauge can be very influential to the accuracy of the pressure difference measurement and the uncertainty of different pressure can be very influential to pressure measurement. That for accurately measuring pressure and pressure difference has certain reference significance.
