期刊名称：ISPRS Annals of the Photogrammetry, Remote Sensing and Spatial Information Sciences
印刷版ISSN：2194-9042
电子版ISSN：2194-9050
出版年度：2004
卷号：XXXV Part B5
页码：696-701
出版社：Copernicus Publications
摘要：We present a new micrometer-sized 3D calibration structure containing nanomarkers that serve as well distinguishablereference points for the calibration of various 3D micro-range measurement methods, e.g. scanning electron microscopy (SEM)and environmental SEM (ESEM). The 3D calibration object was fabricated using gas-assisted focused ion beam (FIB) metaldeposition. This technique proved to be a valuable tool, as it principally allows the construction of variously shapedmicrostructures that can be perfectly adapted to the special specifications of the sensor to be calibrated. The spatial data ofthe 38 non-symmetrically distributed nanomarkers were obtained by high-precision atomic force microscopy (AFM). Theaccuracy of the nanomarker measurement is shown and the efficiency of the calibration is demonstrated by triangulation andspatial intersection. Additionally, alternative micro-range measurement methods, e.g. confocal laser scanning microscopy(CLSM) and scanning profilometry were tested for possible application of the calibration structure
关键词：Accuracy; Calibration; Close Range; Comparison; Correction; Microscopy; Orientation; Photogrammetry
