标题：Correlation of Mechanical Properties with Surface Morphology of Diamond-Like Carbon Films Deposited By Plasma Enhanced Chemical Vapour Deposition Technique
期刊名称：International Journal of Innovative Research in Science, Engineering and Technology
印刷版ISSN：2347-6710
电子版ISSN：2319-8753
出版年度：2014
卷号：3
期号：8
页码：15510
DOI：10.15680/IJIRSET.2014.0308060
出版社：S&S Publications
摘要：Diamond like carbon (DLC) films are deposited on glass substrates by using radio frequency plasmaenhanced chemical vapour deposition technique with the variation of RF power. DLC films are deposited by usingargon and acetylene plasma, at pressure 5×10-2 mbar for 60 minutes. Various properties like surface morphology,hydrophobicity, nanohardness, and structural properties are studied by using atomic force microscope, contact anglemeasurement setup, nano-hardness tester and Raman spectrometer, respectively. Systematic variation in surfacemorphology with RF power has been observed. It has been observed that the morphology of the films is correlated withthe hardness, sp3 content, roughness, and contact angle. Observed results have been explained using Raman spectra.
