期刊名称：International Journal of Innovative Research in Science, Engineering and Technology
印刷版ISSN：2347-6710
电子版ISSN：2319-8753
出版年度：2014
期号：ICIET
页码：631
出版社：S&S Publications
摘要：The ability to telemetrically measurestrain is important in many aspects of daily life whichbrings important scientific and technological challenges inmany sectors such as civil engineering, aircraft modeling,etc..,. Another unrealized, application area is humanmedicine and healthcare. MEMS (Micro Electro-Mechanical System) technology for Radio Frequencyapplications has emerged in recent years as a valuablesolution to fabricate passive components for the aboveapplication with remarkable performance, like very highquality factor and wide capacitance tuning ranges. Thispaper presents a bio-MEMS strain sensor. The sensor isdesigned and fabricated in a suspended architecture thatincreases the quality factor of the sensor with increasedresonance frequency shift under load using RF-MEMSapproach. As load is applied to stainless steel plate itdeforms and modifies the operating frequency shift. Whenthe tissues mineralize, strain in the plate gets decreasesthus allowing the observation of healing process.IntelliSuite software is a design and verification tool forMEMS. This software can simulate actual steps in afabrication process to develop a 3-D model of a devicethat can be used to perform 3-D simulation. Thesuspended architecture is designed and simulated usingthis software. The resonance frequency shift is measuredand the results is found satisfactory.
