期刊名称：International Journal of Advanced Research in Computer Engineering & Technology (IJARCET)
印刷版ISSN：2278-1323
出版年度：2012
卷号：1
期号：10
页码：259-264
出版社：Shri Pannalal Research Institute of Technolgy
摘要：In this paper, we have addressed the issues related to the design and simulation of MEMS based silicon micro-needles for insertion of fluid into the dermis and subcutaneous fat layer of human skin. Microelectromechanical systems (MEMS) are uncovered to an assortment of liquid environments in applications such as chemical and biological sensors and microfluidic devices .Green interactions between liquids and microscale structures can lead to volatile performance of MEMS in liquid environments. In this paper, the design and fabrication of a multi- material high-performance micropump is presented. The micropumps are fabricated using MEMS fabrication techniques, comprised of silicon and Pyrex micromachining and bonding. Manufacturing steps such as three small bulk cylindrical piezoelectric material elements that are integrated with micro-fabricated silicon-on- insulator (SOI) and glass micromachined substrates using eutectic bonding and anodic bonding processes were successfully realized and p r o v i d e a r o b u s t and scalable production technique for the micro pump. Exceptional flow rates of 0.1 ml/min with 1 W power consumption based on piezoelectric stack actuation achieved by appropriate design optimization.
