期刊名称：International Journal of Innovative Research in Science, Engineering and Technology
印刷版ISSN：2347-6710
电子版ISSN：2319-8753
出版年度：2016
卷号：5
期号：4
页码：6529
DOI：10.15680/IJIRSET.2016.0504261
出版社：S&S Publications
摘要：Indium Tin Oxide (ITO) thin films were deposited at room temperature and then annealed by a rapidthermal annealing under different different temperaturefrom 400℃ to 700 ℃for 5min inthe atmosphere of 98%nitrogen + 2% hydrogen ambient gas. In order to know the rapid thermal annealing effect, weinvestigated for theirstructural, optical and electrical properties by using x-ray diffraction and scanning electron microscopy while opticalproperties were studied by the UV transmittance equipment. It is observed that the ITO thin film annealed at 500℃reveals the strong Intensity and narrowest full with at half maximum among the temperature ranges studiedThe uniformity of the electronic properties and the optical properties was also improved
