期刊名称：International Journal of Innovative Research in Science, Engineering and Technology
印刷版ISSN：2347-6710
电子版ISSN：2319-8753
出版年度：2013
卷号：2
期号：7
页码：3144
出版社：S&S Publications
摘要：In this work, we have synthesized ZnO thin film on quartz substrate by RF magnetron sputtering method.We annealed these films at three different temperatures of 200oC, 400oC and 600oC. The absorption spectra showedthat the band gap of the deposited film was about 3.29 eV. So it confirmed that the film was of ZnO. As temperatureincreased the band gap of the film decreased. Transmittance spectra revealed that the transparency of the film increasedwith rise in temperature. Different optical constants such as refractive index, film thickness, band gap, transmittance,extinction coefficient and so on were investigated and compared at different temperatures. Ellipsometry revealed thatthe thickness of the film was 125 nm.
