摘要：Compressive force sensors or pressure sensors are indispensable to tactile sensors in humanoid robots. It is investigated that low-cost electro-conducting rubber sheets are applied to the force sensor, of which the biggest problem is its poor reproducibility. It was found that the aluminum deposition by a vacuum evaporation method shows excellent characteristics but suffers deterioration by a radiation heating effect. The aluminum electrode was deposited by a sputtering method, known to have an advantage of a low-temperature method, and the reproducibility of the output was improved.
